Cubic Sensor and Instrument Co.,Ltd.
Cubic Gas Monitoring Solutions for Manufacturing Process

Cubic Gas Monitoring Solutions for Manufacturing Process

Environmental air quality, process quality, and production safety plays a crucial role for modern manufacturing process. To contribute to better production, Cubic provides high-precision, real-time gas monitoring solutions designed for manufacturing processes.

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Industrial manufacturing environments operate under continuous production conditions where environmental parameters and safety are critical. Across a wide range of manufacturing sectors, operations rely on real-time monitoring to maintain stable environmental conditions. 


As manufacturers need to meet strict environmental and production standards during  manufacturing process, Cubic provides real-time, high-precision gas monitoring solutions to support environmental air quality and production safety.

A: Environmental Air Quality Monitoring

Environmental air quality monitoring is key to  manufacturing process, as tiny particles can damage product quality. Cleanrooms help control contaminants and follow ISO 14644 standards for classification levels. Cubic supports cleanroom control with real-time detection of particles, humidity, and temperature to keep environmental conditions stable.

Airborne Particle Counter

For environmental air quality monitoring, Cubic has developed the light-scattering online particle counter based on core technology platform. The products use a high-power industrial-grade laser and photoelectric conversion technology to detect airborne particles in real time across six size ranges.


RH & Temp Transmitter

Cubic offers IAQ transmitters based on NDIR and MEMS MOX technology for real-time monitoring. The product supports wireless monitoring, making installation flexible and reducing the need for wiring. With a built-in touch screen, users can easily view data, adjust settings, and perform on-site calibration.


B: Process Quality Monitoring

Cubic process quality monitoring solution detects trace moisture, trace oxygen, and other key gases including tungsten hexafluoride and silicon tetrafluoride, used in manufacturing process. Real-time monitoring helps improve process stability and quality.

Trace Moisture & Oxygen Sensor

Cubic trace moisture sensor is developed based on TDLAS technology. It delivers exceptional baseline stability, sensitivity, and fast response. It is specifically designed for real-time monitoring of trace moisture in ultra-clean environment. Moreover, Cubic trace oxygen sensor is developed based on zirconia technology. It is easy to integrate and install, equipped with one RS-232 and two RS-485 ports. The sensor is designed to detect ultra-low concentrations of oxygen in high-purity gases.


Pressure Sensor & Mass Flow Controller

Cubic provides pressure sensors and mass flow controllers featuring modular designs for flexible integration, and support multiple communication modes and power supplies. The products are chemically resistant to corrosive gases and vapors, ensuring durability and reliability in harsh process environments.


C: Safety Production Monitoring

Dangerous and flammable gases are commonly used. Any leaks or spills can harm workers, damage equipment, and interrupt production. Continuous gas monitoring helps detect problems early, allowing quick action to reduce risks. Cubic's Safety production monitoring solution provides accurate, real-time gas detection that improves safety, and helps keep manufacturing operations stable.


SiF4, WF6 Gas Sensor

Based on NDIR technology, Cubic develops gas sensors designed for monitoring tungsten hexafluoride (WF₆) and silicon tetrafluoride (SiF₄), which are widely used in industrial manufacturing process. 

Industry Standards and Regulations

Multiple international standards and regulations have been established to guide the semiconductor industry in maintaining safe, clean, and efficient manufacturing environments. Adhering to standards is essential not only for ensuring product quality and worker safety but also for meeting regulatory requirements and sustaining global competitiveness. 


Standard/RegulationDescription
ISO 14644It defines the required levels of cleanliness by particle concentration, with ISO Class 1 being the cleanest.
USP 797References ISO 14644 air cleanliness classifications and requires particle monitoring as part of environmental control and risk management in pharmaceutical compounding areas.
EU GMP Annex 1Requires continuous or periodic airborne particle counting in sterile manufacturing environments to verify environmental control and support contamination risk management.
ANSI/ESD S20.20This standard sets requirements to control ESD in manufacturing environments, which is critical for protecting sensitive products and components.



Improve Energy Efficiency<br>
With Cubic Manufacturing Process Monitoring Solution
Improve Energy Efficiency
With Cubic Manufacturing Process Monitoring Solution
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Core Technologies

TDLAS
NDIR
LSD
MEMS MOx
Tunable Diode Laser Spectroscopy
Tunable Diode Laser Spectroscopy
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Non-dispersive Infrared
Non-dispersive Infrared
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Light-scattering
Light-scattering
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Micro-Electro-Mechanical Systems (MEMS)<br>Metal Oxide Semiconductor (MOx)
Micro-Electro-Mechanical Systems (MEMS)
Metal Oxide Semiconductor (MOx)
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Cubic Certificates

OPC-6511DS series CE Certificate
OPC-6511DS series CE Certificate
OPC-6510 Series CE Certificate
OPC-6510 Series CE Certificate
OPC-6303 Series CE Certificate
OPC-6303 Series CE Certificate
AM6108A RESET Certificate
AM6108A RESET Certificate
AM7000 CE Certificate
AM7000 CE Certificate
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