NDIR WF6 Gas Sensor

Gasboard-2061 is a high-performance WF6 gas sensor designed for real-time semiconductor chamber cleaning endpoint detection (EPD) in tungsten CVD (WCVD) deposition chambers. Based on Non-Dispersive Infrared (NDIR) technology, Gasboard-2061 enables highly sensitive and accurate WF6 concentration measurement under complex process conditions. By tracking WF6 concentration changes in real time, Gasboard-2061 enables precise and timely endpoint indication, helping to reduce cleaning time and over-cleaning gas consumption, while minimizing chamber wear and extending the lifetime of critical system components.

Features of NDIR WF6 Gas Sensor

NDIR technology for high sensitive and accurate WF6 measurement
Rapid response for real-time concentration change tracking
Low zero drift and high repeatability for consistent measurement performance
Robust sealing design for stable operation in vacuum environments
316L corrosion-resistant construction for durability in harsh process conditions
Analog and digital communication interfaces for convenient integration and maintenance

Specification of NDIR WF6 Gas Sensor

Measurement Component	WF6
Range	0-200 mTorr
Repeatability 1 2	±0.5%
Accuracy 1 2	±1%F.S.
Operating Voltage	24VDC
Operating Current	1.5A (max)
Analog Interface	Analog Output: 0–5 VDC (4 ch) or 4–20 mA (4 ch) Analog Input: 0–10 VDC (1 ch
Digital Interface	Digital Output: 4 ch Digital Input: 1 ch
Communication	RS485
Sampling Port	NW25
Leak Rate³	≤1 x 10-6 Pa·m3/s (He)
Operating Ambient Temperature	(20～35) ℃

1. All data in the table are measured under standard atmospheric pressure.

2. Measurement standard gases are provided by institutions certified by national metrology authorities. All gases are diluted in dry nitrogen with a purity of ≥99.999%.

3. The above performance is determined after calibration. All sensors are 100% calibrated during production.

4. Measurements are conducted at 25 °C ambient temperature.