Cubic Sensor and Instrument Co.,Ltd.
Semiconductor Gas Analyzer

Semiconductor Gas Analyzer

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Overview for Cubic Semiconductor Gas Analyzer

  • Trace Oxygen Gas Analyzer
    • Zirconia technology for high-precision ppm-level oxygen measurement

    • Excellent long-term stability with no regular calibration required

    • Strong anti-interference capability with minimal interference from other gases

    • Compact modular design for easy installation

    • User-friendly interface with clear informative display for convenient operation

    Trace Oxygen Gas Analyzer Gasboard-3052

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  • NDIR WF6 Gas Sensor
    • NDIR technology for high sensitive and accurate WF6 measurement

    • Rapid response for real-time concentration change tracking

    • Low zero drift and high repeatability for consistent measurement performance

    • Robust sealing design for stable operation in vacuum environments

    • 316L corrosion-resistant construction for durability in harsh process conditions

    • Analog and digital communication interfaces for convenient integration and maintenance

    NDIR WF6 Gas Sensor Gasboard-2061

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  • NDIR SiF4 Gas Sensor
    • NDIR technology for high sensitive and accurate SiF4 measurement

    • Fast response for precise deposition chamber cleaning endpoint determination

    • Low zero drift and high repeatibility for consistent measurement performance

    • Modular design for easy system integration

    • Analog and digital communication outputs

    NDIR SiF4 Gas Sensor Gasboard-2060

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