Zirconia technology for high-precision ppm-level oxygen measurement
Excellent long-term stability with no regular calibration required
Strong anti-interference capability with minimal interference from other gases
Compact modular design for easy installation
User-friendly interface with clear informative display for convenient operation
NDIR technology for high sensitive and accurate WF6 measurement
Rapid response for real-time concentration change tracking
Low zero drift and high repeatability for consistent measurement performance
Robust sealing design for stable operation in vacuum environments
316L corrosion-resistant construction for durability in harsh process conditions
Analog and digital communication interfaces for convenient integration and maintenance
NDIR technology for high sensitive and accurate SiF4 measurement
Fast response for precise deposition chamber cleaning endpoint determination
Low zero drift and high repeatibility for consistent measurement performance
Modular design for easy system integration
Analog and digital communication outputs